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[M9] Understanding of Scanning Electron Microscope (SEM)

[M9] Understanding of Scanning Electron Microscope (SEM) [이미지]
  • Overview
    This manual explains the signal and analysis method, composition, and analysis method of Scanning Electron Microscope (SEM), using visual materials for a better understanding. It is published for equipment use by providing tips on equipment analysis method, precautions during operation and its utilization. A SEM is a tool that observes a shape or microstructure after receiving the enlarged images of a subject by collecting the signals that occur on the surface of a sample with a defect and displaying their intensity in a 3D image format and analyzes the distribution, quantity, and quality of the components by installing an Energy Dispersive X-ray (EDX) and Wavelength Dispersive X-ray (WDX). It is widely used in observing the micro-structure and shape of small objects in a solid state across almost all industries including metal scrap, ore and fossil, semiconductor device and network quality inspection, polymer and organic matter, and biological samples.
  • Table of Contents
    Ⅰ. Equipment overview
    1. Basic principles
    2. Composition and functions

    Ⅱ. Operation of equipment
    1. Sample pre-treatment method
    2. Analysis method
    3. Precautions during operation

    Ⅲ. Equipment management
    1. Inspection guidelines
    2. Maintenance guidelines

    Ⅳ. Equipment utilization

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